Pitch standard Array of 5 silicon lines with vertical, paralell sidewalls (111-crystal planes) Linewidth: 100 nm (actual linewidth is delivered for each chip) Pitch: 500 nm ± 10nm Depth: ~ 900 nm Surface/sidewall angle: 90° ± 0.5° Sidewall parallelity: < 0.4° Top corner radius: < 10 nm Well suited also as SEM standard |
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