For step height measurements of high aspect ratio structures.
Specifications:
| Spike: Aspect ratio: Typ. full cone angle: Radius: | > 2 µm on pedestal > 5 : 1 8° < 20 nm, typ. 10 nm |
Available cantilever
l = 125 µm, C = 40 N/m, fo = 300 kHz
l = 225 µm, C = 3.0 N/m, fo = 75 kHz