Typical application of CDR - Tips are measurements
of:
- side wall roughness,
- slope angle,
- trench depths, and
- step height
photoresist, scanned with CDR-Tip
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These tips are widely used in Veecos X3D. Typical application of CDR - Tips are measurements of:
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3-D image of standing waves in photoresist, scanned with CDR-Tip |